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		<id>http://wiki.jeol.com.cn/wiki/index.php?action=history&amp;feed=atom&amp;title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F</id>
		<title>透镜系统 - 版本历史</title>
		<link rel="self" type="application/atom+xml" href="http://wiki.jeol.com.cn/wiki/index.php?action=history&amp;feed=atom&amp;title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F"/>
		<link rel="alternate" type="text/html" href="http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;action=history"/>
		<updated>2026-05-24T18:24:26Z</updated>
		<subtitle>本wiki的该页面的版本历史</subtitle>
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	<entry>
		<id>http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;diff=556&amp;oldid=prev</id>
		<title>Li.qun：/* 36-3. condenser-objective lens (C-O lens) */</title>
		<link rel="alternate" type="text/html" href="http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;diff=556&amp;oldid=prev"/>
				<updated>2020-08-21T03:22:23Z</updated>
		
		<summary type="html">&lt;p&gt;‎&lt;span dir=&quot;auto&quot;&gt;&lt;span class=&quot;autocomment&quot;&gt;36-3. condenser-objective lens (C-O lens)&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;
&lt;table class=&quot;diff diff-contentalign-left&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;tr style='vertical-align: top;' lang='zh-Hans'&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;←上一版本&lt;/td&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;2020年8月21日 (五) 03:22的版本&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l175&quot; &gt;第175行：&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;第175行：&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;For observation of the TEM image including a HREM image (atomic level resolution image), parallel beam illumination onto a specimen is required. To produce the parallel beam, a condenser mini lens is used to converge the incident beam onto the focal point of the pre-magnetic field of the C-O lens (right of Fig. 3). The electron beam passing through the specimen is enlarged by the post-magnetic field of the C-O lens and further enlarged with intermediate and projector lenses, and finally a TEM image is formed on the screen.&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;For observation of the TEM image including a HREM image (atomic level resolution image), parallel beam illumination onto a specimen is required. To produce the parallel beam, a condenser mini lens is used to converge the incident beam onto the focal point of the pre-magnetic field of the C-O lens (right of Fig. 3). The electron beam passing through the specimen is enlarged by the post-magnetic field of the C-O lens and further enlarged with intermediate and projector lenses, and finally a TEM image is formed on the screen.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[[文件:C-O lens.jpg]]&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[[文件:C-O lens.jpg]]&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[[文件:C-O lens-3.jpg]]&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[[文件:C-O lens-3.jpg]]&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;lt;pre&amp;gt;Related term&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;lt;pre&amp;gt;Related term&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Li.qun</name></author>	</entry>

	<entry>
		<id>http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;diff=555&amp;oldid=prev</id>
		<title>Li.qun：/* 36-3. condenser-objective lens (C-O lens) */</title>
		<link rel="alternate" type="text/html" href="http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;diff=555&amp;oldid=prev"/>
				<updated>2020-08-21T03:22:06Z</updated>
		
		<summary type="html">&lt;p&gt;‎&lt;span dir=&quot;auto&quot;&gt;&lt;span class=&quot;autocomment&quot;&gt;36-3. condenser-objective lens (C-O lens)&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;
&lt;table class=&quot;diff diff-contentalign-left&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;tr style='vertical-align: top;' lang='zh-Hans'&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;←上一版本&lt;/td&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;2020年8月21日 (五) 03:22的版本&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l175&quot; &gt;第175行：&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;第175行：&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;For observation of the TEM image including a HREM image (atomic level resolution image), parallel beam illumination onto a specimen is required. To produce the parallel beam, a condenser mini lens is used to converge the incident beam onto the focal point of the pre-magnetic field of the C-O lens (right of Fig. 3). The electron beam passing through the specimen is enlarged by the post-magnetic field of the C-O lens and further enlarged with intermediate and projector lenses, and finally a TEM image is formed on the screen.&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;For observation of the TEM image including a HREM image (atomic level resolution image), parallel beam illumination onto a specimen is required. To produce the parallel beam, a condenser mini lens is used to converge the incident beam onto the focal point of the pre-magnetic field of the C-O lens (right of Fig. 3). The electron beam passing through the specimen is enlarged by the post-magnetic field of the C-O lens and further enlarged with intermediate and projector lenses, and finally a TEM image is formed on the screen.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[[文件:C-O lens.jpg]]&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[[文件:C-O lens.jpg]]&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;−&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;#160;&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;[[文件:C-O lens-3.jpg]]&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;lt;pre&amp;gt;Related term&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;lt;pre&amp;gt;Related term&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;condenser mini lens&amp;lt;/pre&amp;gt;&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;condenser mini lens&amp;lt;/pre&amp;gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Li.qun</name></author>	</entry>

	<entry>
		<id>http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;diff=553&amp;oldid=prev</id>
		<title>Li.qun：/* 36-3. condenser-objective lens (C-O lens) */</title>
		<link rel="alternate" type="text/html" href="http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;diff=553&amp;oldid=prev"/>
				<updated>2020-08-21T03:20:05Z</updated>
		
		<summary type="html">&lt;p&gt;‎&lt;span dir=&quot;auto&quot;&gt;&lt;span class=&quot;autocomment&quot;&gt;36-3. condenser-objective lens (C-O lens)&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;
&lt;table class=&quot;diff diff-contentalign-left&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;tr style='vertical-align: top;' lang='zh-Hans'&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;←上一版本&lt;/td&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;2020年8月21日 (五) 03:20的版本&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l174&quot; &gt;第174行：&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;第174行：&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;Demagnification of the incident beam by the C-O lens is essential for obtaining a high resolution of the STEM image, sub-nanometer-area illumination for CBED and for decreasing the analysis area (sub-nanometer-size) of EDS and EELS. The post-magnetic field (second lens) produces an enlarged image of the focused beam on the specimen.&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;Demagnification of the incident beam by the C-O lens is essential for obtaining a high resolution of the STEM image, sub-nanometer-area illumination for CBED and for decreasing the analysis area (sub-nanometer-size) of EDS and EELS. The post-magnetic field (second lens) produces an enlarged image of the focused beam on the specimen.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;For observation of the TEM image including a HREM image (atomic level resolution image), parallel beam illumination onto a specimen is required. To produce the parallel beam, a condenser mini lens is used to converge the incident beam onto the focal point of the pre-magnetic field of the C-O lens (right of Fig. 3). The electron beam passing through the specimen is enlarged by the post-magnetic field of the C-O lens and further enlarged with intermediate and projector lenses, and finally a TEM image is formed on the screen.&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;For observation of the TEM image including a HREM image (atomic level resolution image), parallel beam illumination onto a specimen is required. To produce the parallel beam, a condenser mini lens is used to converge the incident beam onto the focal point of the pre-magnetic field of the C-O lens (right of Fig. 3). The electron beam passing through the specimen is enlarged by the post-magnetic field of the C-O lens and further enlarged with intermediate and projector lenses, and finally a TEM image is formed on the screen.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;[[文件:C-O lens.jpg]]&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;lt;pre&amp;gt;Related term&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;lt;pre&amp;gt;Related term&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Li.qun</name></author>	</entry>

	<entry>
		<id>http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;diff=551&amp;oldid=prev</id>
		<title>Li.qun：/* 36-3. condenser-objective lens (C-O lens) */</title>
		<link rel="alternate" type="text/html" href="http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;diff=551&amp;oldid=prev"/>
				<updated>2020-08-21T03:18:45Z</updated>
		
		<summary type="html">&lt;p&gt;‎&lt;span dir=&quot;auto&quot;&gt;&lt;span class=&quot;autocomment&quot;&gt;36-3. condenser-objective lens (C-O lens)&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;
&lt;table class=&quot;diff diff-contentalign-left&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;tr style='vertical-align: top;' lang='zh-Hans'&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;←上一版本&lt;/td&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;2020年8月21日 (五) 03:18的版本&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l170&quot; &gt;第170行：&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;第170行：&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;condenser-objective lens (C-O lens), condenser lens, objective mini lens, scanning transmission electron microscope (STEM) image, convergent-beam electron diffraction, CBED, high-resolution electron microscopy, HREM&amp;lt;/pre&amp;gt;&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;condenser-objective lens (C-O lens), condenser lens, objective mini lens, scanning transmission electron microscope (STEM) image, convergent-beam electron diffraction, CBED, high-resolution electron microscopy, HREM&amp;lt;/pre&amp;gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;===36-3. condenser-objective lens (C-O lens)===&amp;#160; &amp;#160;&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;===36-3. condenser-objective lens (C-O lens)===&amp;#160; &amp;#160;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;−&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;The &lt;del class=&quot;diffchange diffchange-inline&quot;&gt;&amp;quot;&lt;/del&gt;condenser-objective lens (C-O lens)&lt;del class=&quot;diffchange diffchange-inline&quot;&gt;&amp;quot; &lt;/del&gt;makes &lt;del class=&quot;diffchange diffchange-inline&quot;&gt;the &lt;/del&gt;pre-magnetic field &lt;del class=&quot;diffchange diffchange-inline&quot;&gt;of the objective lens &lt;/del&gt;act as a condenser lens &lt;del class=&quot;diffchange diffchange-inline&quot;&gt;so that &lt;/del&gt;the electron beam &lt;del class=&quot;diffchange diffchange-inline&quot;&gt;is &lt;/del&gt;focused onto &lt;del class=&quot;diffchange diffchange-inline&quot;&gt;the &lt;/del&gt;specimen, and makes &lt;del class=&quot;diffchange diffchange-inline&quot;&gt;the &lt;/del&gt;post-magnetic field act as an objective lens to form the specimen image &lt;del class=&quot;diffchange diffchange-inline&quot;&gt;at &lt;/del&gt;the image plane. &lt;del class=&quot;diffchange diffchange-inline&quot;&gt;Since &lt;/del&gt;the electron beam is &lt;del class=&quot;diffchange diffchange-inline&quot;&gt;demagnfied to ～1/100 &lt;/del&gt;by the pre-magnetic field on the specimen&lt;del class=&quot;diffchange diffchange-inline&quot;&gt;, &lt;/del&gt;the C-O lens is essential for &lt;del class=&quot;diffchange diffchange-inline&quot;&gt;various purposes&lt;/del&gt;, &lt;del class=&quot;diffchange diffchange-inline&quot;&gt;such as CBED that requires &lt;/del&gt;sub-nanometer-area illumination&lt;del class=&quot;diffchange diffchange-inline&quot;&gt;, improvement of STEM image resolution, &lt;/del&gt;and decreasing of &lt;del class=&quot;diffchange diffchange-inline&quot;&gt;analysis region for &lt;/del&gt;EDS and EELS. To produce &lt;del class=&quot;diffchange diffchange-inline&quot;&gt;a &lt;/del&gt;parallel beam &lt;del class=&quot;diffchange diffchange-inline&quot;&gt;for HREM in the TEM mode&lt;/del&gt;, a condenser mini lens is used.&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;The condenser-objective lens (C-O lens) makes &lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;its &lt;/ins&gt;pre-magnetic field act as a condenser lens &lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;for &lt;/ins&gt;the electron beam &lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;to be &lt;/ins&gt;focused onto &lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;a &lt;/ins&gt;specimen, and makes &lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;its &lt;/ins&gt;post-magnetic field act as an objective lens to form the specimen image &lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;on &lt;/ins&gt;the image plane.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;The C-O lens has only one peak of the magnetic field in the gap of &lt;/ins&gt;the &lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;lens as shown by a red line in Fig. 1, but it acts as two lenses because of its strong magnetic field as shown by two brown ellipses in Fig. 2. The incident &lt;/ins&gt;electron beam is &lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;strongly converged &lt;/ins&gt;by the pre-magnetic field &lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;(first lens) as shown by the yellow lines, and the lens demagnifies the size of the incident beam down to ～1/100 to form a small probe &lt;/ins&gt;on the specimen &lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;plane.&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;Demagnification of the incident beam by &lt;/ins&gt;the C-O lens is essential for &lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;obtaining a high resolution of the STEM image&lt;/ins&gt;, sub-nanometer-area illumination &lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;for CBED &lt;/ins&gt;and &lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;for &lt;/ins&gt;decreasing &lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;the analysis area (sub-nanometer-size) &lt;/ins&gt;of EDS and EELS&lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;. The post-magnetic field (second lens) produces an enlarged image of the focused beam on the specimen.&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;For observation of the TEM image including a HREM image (atomic level resolution image), parallel beam illumination onto a specimen is required&lt;/ins&gt;. To produce &lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;the &lt;/ins&gt;parallel beam, a condenser mini lens is used &lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;to converge the incident beam onto the focal point of the pre-magnetic field of the C-O lens (right of Fig. 3). The electron beam passing through the specimen is enlarged by the post-magnetic field of the C-O lens and further enlarged with intermediate and projector lenses, and finally a TEM image is formed on the screen&lt;/ins&gt;.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;#160;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;lt;pre&amp;gt;Related term&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;lt;pre&amp;gt;Related term&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;condenser mini lens&amp;lt;/pre&amp;gt;&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;condenser mini lens&amp;lt;/pre&amp;gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;==37. combination aberration==&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;==37. combination aberration==&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;If two thin optical elements (lenses, multi-poles, etc.) are placed at a free space, higher order aberrations than those inherent to the elements can arise due to a synergetic effect of the inherent aberrations. The higher order aberrations induced are called &amp;quot;combination aberrations.&amp;quot; A thick hexapole spherical aberration corrector produces a third-order negative spherical aberration by a self-conbination effect of two three-fold astigmatism fields (second-order aberration). With the use of this third-order negative spherical aberration, the third-order positive aberration of the objective lens can be corrected. In the case of the combination between a spherical aberration (Cs) corrector and an objective lens with a free space (incomplete image transfer) between them, a positive or negative fifth-order spherical aberration is induced by a cross combination between the third-order negative aberration of the Cs corrector and the third-order positive aberration of the objective lens. Using the fifth-order spherical aberration produced, the residual fifth-order spherical aberration of the system can be removed.&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;If two thin optical elements (lenses, multi-poles, etc.) are placed at a free space, higher order aberrations than those inherent to the elements can arise due to a synergetic effect of the inherent aberrations. The higher order aberrations induced are called &amp;quot;combination aberrations.&amp;quot; A thick hexapole spherical aberration corrector produces a third-order negative spherical aberration by a self-conbination effect of two three-fold astigmatism fields (second-order aberration). With the use of this third-order negative spherical aberration, the third-order positive aberration of the objective lens can be corrected. In the case of the combination between a spherical aberration (Cs) corrector and an objective lens with a free space (incomplete image transfer) between them, a positive or negative fifth-order spherical aberration is induced by a cross combination between the third-order negative aberration of the Cs corrector and the third-order positive aberration of the objective lens. Using the fifth-order spherical aberration produced, the residual fifth-order spherical aberration of the system can be removed.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Li.qun</name></author>	</entry>

	<entry>
		<id>http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;diff=550&amp;oldid=prev</id>
		<title>Li.qun：/* 55-2. objective lens */</title>
		<link rel="alternate" type="text/html" href="http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;diff=550&amp;oldid=prev"/>
				<updated>2020-07-29T02:06:57Z</updated>
		
		<summary type="html">&lt;p&gt;‎&lt;span dir=&quot;auto&quot;&gt;&lt;span class=&quot;autocomment&quot;&gt;55-2. objective lens&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;
&lt;table class=&quot;diff diff-contentalign-left&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;tr style='vertical-align: top;' lang='zh-Hans'&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;←上一版本&lt;/td&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;2020年7月29日 (三) 02:06的版本&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l272&quot; &gt;第272行：&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;第272行：&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;===55-2. objective lens===&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;===55-2. objective lens===&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;The &amp;quot;objective lens&amp;quot; is the first-stage lens to form an image using electrons exiting from the specimen. The objective lens is the most important lens in the imaging lens system because the performance of this lens determines the image quality (resolution, contrast, etc). A good objective lens has both a small spherical aberration (Cs) coefficient and a small chromatic aberration (Cc) coefficient. To decrease these coefficients, shortening the distance between the two magnetic poles and decreasing the bore diameter of the polepiece and are required. Since the side-entry-type specimen holder is inserted between the two magnetic poles, there is a limitation on shortening the distance. For the top-entry-type specimen holder, an asymmetric polepiece whose upper bore diameter is larger than that of the lower one is used.&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;The &amp;quot;objective lens&amp;quot; is the first-stage lens to form an image using electrons exiting from the specimen. The objective lens is the most important lens in the imaging lens system because the performance of this lens determines the image quality (resolution, contrast, etc). A good objective lens has both a small spherical aberration (Cs) coefficient and a small chromatic aberration (Cc) coefficient. To decrease these coefficients, shortening the distance between the two magnetic poles and decreasing the bore diameter of the polepiece and are required. Since the side-entry-type specimen holder is inserted between the two magnetic poles, there is a limitation on shortening the distance. For the top-entry-type specimen holder, an asymmetric polepiece whose upper bore diameter is larger than that of the lower one is used.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;[[文件:Objective lens.jpg]]&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;Fig. The objective lens consists of a polepiece to determine the magnetic-field of the lens, a yoke to create a magnetic path, and a copper wire coil. The coil is wound in the yoke around the circumference of the optical axis. A magnetic field is generated by the electric current passing through the coil and a magnetic flux is generated in the yoke. Then, a leakage magnetic field is created in vacuum from the polepiece attached to the end of the yoke. The polepiece of the lens is made of a magnetic component and has a gap to create a leakage magnetic field. As is seen in Figure, the polepiece is cylindrically symmetric and an electron beam passes through the center of the polepiece.&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;Fig. The objective lens consists of a polepiece to determine the magnetic-field of the lens, a yoke to create a magnetic path, and a copper wire coil. The coil is wound in the yoke around the circumference of the optical axis. A magnetic field is generated by the electric current passing through the coil and a magnetic flux is generated in the yoke. Then, a leakage magnetic field is created in vacuum from the polepiece attached to the end of the yoke. The polepiece of the lens is made of a magnetic component and has a gap to create a leakage magnetic field. As is seen in Figure, the polepiece is cylindrically symmetric and an electron beam passes through the center of the polepiece.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Li.qun</name></author>	</entry>

	<entry>
		<id>http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;diff=548&amp;oldid=prev</id>
		<title>Li.qun：/* 55-2. objective lens */</title>
		<link rel="alternate" type="text/html" href="http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;diff=548&amp;oldid=prev"/>
				<updated>2020-07-29T02:05:21Z</updated>
		
		<summary type="html">&lt;p&gt;‎&lt;span dir=&quot;auto&quot;&gt;&lt;span class=&quot;autocomment&quot;&gt;55-2. objective lens&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;
&lt;table class=&quot;diff diff-contentalign-left&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;tr style='vertical-align: top;' lang='zh-Hans'&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;←上一版本&lt;/td&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;2020年7月29日 (三) 02:05的版本&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l271&quot; &gt;第271行：&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;第271行：&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;===55-2. objective lens===&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;===55-2. objective lens===&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;−&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;The &amp;quot;objective lens&amp;quot; is the first-stage lens to form an image using electrons exiting from the specimen. The objective lens is the most important lens in the imaging lens system because the performance of this lens determines the image quality (resolution, contrast, etc). A good objective lens has both a small spherical aberration (Cs) coefficient and a small chromatic aberration (Cc) coefficient. To decrease these coefficients, shortening the distance between the two magnetic poles and decreasing the bore diameter of the polepiece and are required. Since the side-entry-type specimen holder is inserted between the two magnetic poles, there is a limitation on shortening the distance. For the top-entry-type specimen holder, an asymmetric &lt;del class=&quot;diffchange diffchange-inline&quot;&gt;popiece &lt;/del&gt;whose upper bore diameter is larger than that of the lower one is used.&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;The &amp;quot;objective lens&amp;quot; is the first-stage lens to form an image using electrons exiting from the specimen. The objective lens is the most important lens in the imaging lens system because the performance of this lens determines the image quality (resolution, contrast, etc). A good objective lens has both a small spherical aberration (Cs) coefficient and a small chromatic aberration (Cc) coefficient. To decrease these coefficients, shortening the distance between the two magnetic poles and decreasing the bore diameter of the polepiece and are required. Since the side-entry-type specimen holder is inserted between the two magnetic poles, there is a limitation on shortening the distance. For the top-entry-type specimen holder, an asymmetric &lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;polepiece &lt;/ins&gt;whose upper bore diameter is larger than that of the lower one is used.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;#160;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;Fig. The objective lens consists of a polepiece to determine the magnetic-field of the lens, a yoke to create a magnetic path, and a copper wire coil. The coil is wound in the yoke around the circumference of the optical axis. A magnetic field is generated by the electric current passing through the coil and a magnetic flux is generated in the yoke. Then, a leakage magnetic field is created in vacuum from the polepiece attached to the end of the yoke. The polepiece of the lens is made of a magnetic component and has a gap to create a leakage magnetic field. As is seen in Figure, the polepiece is cylindrically symmetric and an electron beam passes through the center of the polepiece.&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;The leakage magnetic field (B) has a curvature (shown in Figure) and acts as a lens to converge the electron beam. The strength of the lens can be varied by changing the electric current of the coil. A specimen usually set on a side-entry type holder is placed in the magnetic field (lens) produced by the polepiece.&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;The polepiece determines the performance of the lens, that is, the strength and shape of the magnetic field of the lens. Thus, the polepiece is made of a high-quality magnetic material than that of the yoke and is processed by high precision machining.&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;The objective lens is requested to possess a stronger magnetic field than the intermediate lens, etc., because the focal length of the objective lens is shorter than the other lens. To meet this requirement, the objective lens is made of a magnetic material with a large saturation magnetization.&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;The objective lens used for high spatial-resolution observation requires a further-stronger magnetic field to decrease the aberration of the lens. For this purpose, a polepiece with a narrow gap (a short distance between the upper and lower poles) is used. On the other hand, the objective lens used for element analysis uses a polepiece with a little wider gap at a little sacrifice of image resolution because a more space is needed for an EDS detector to place close to the specimen for increasing the detection efficiency or to ensure a large tilt angle of the specimen.&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;#160;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;lt;pre&amp;gt;Related term &amp;#160;&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;lt;pre&amp;gt;Related term &amp;#160;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;ultra-high-resolution polepiece, multiuse polepiece, high-contrast polepiece&amp;lt;/pre&amp;gt;&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;ultra-high-resolution polepiece, multiuse polepiece, high-contrast polepiece&amp;lt;/pre&amp;gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;===55-3. objective mini lens===&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;===55-3. objective mini lens===&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;The &amp;quot;objective mini lens&amp;quot; is a weakly excited lens placed below the objective lens. This lens does not have a polepiece to strengthen a magnetic field as the objective lens does. This lens is used to form an image on the selector aperture in Low MAG mode (～50× to 3,000×) by stopping the excitation of the objective lens. The magnification at the objective mini lens is 1× to 2×. This lens is also used to obtain a high quality low magnification image of about 1,000× in the MAG mode. That is, the excitation of the objective lens is kept strong to maintain image quality of the objective-lens, and the image is demagnified (to ～0.5×) by the objective mini lens, thus a wide view image is formed on the object plane of the intermediate lens.&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;The &amp;quot;objective mini lens&amp;quot; is a weakly excited lens placed below the objective lens. This lens does not have a polepiece to strengthen a magnetic field as the objective lens does. This lens is used to form an image on the selector aperture in Low MAG mode (～50× to 3,000×) by stopping the excitation of the objective lens. The magnification at the objective mini lens is 1× to 2×. This lens is also used to obtain a high quality low magnification image of about 1,000× in the MAG mode. That is, the excitation of the objective lens is kept strong to maintain image quality of the objective-lens, and the image is demagnified (to ～0.5×) by the objective mini lens, thus a wide view image is formed on the object plane of the intermediate lens.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Li.qun</name></author>	</entry>

	<entry>
		<id>http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;diff=547&amp;oldid=prev</id>
		<title>2020年7月2日 (四) 03:13 Li.qun</title>
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				<updated>2020-07-02T03:13:41Z</updated>
		
		<summary type="html">&lt;p&gt;&lt;/p&gt;
&lt;table class=&quot;diff diff-contentalign-left&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;col class='diff-marker' /&gt;
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				&lt;tr style='vertical-align: top;' lang='zh-Hans'&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;←上一版本&lt;/td&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;2020年7月2日 (四) 03:13的版本&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l445&quot; &gt;第445行：&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;第445行：&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;Compared with the C-TEM image, the ZPC-TEM image clearly visualizes the fine structures of DNA in a capsid, the hair-like structural objects and the cylindrical structures on the capsid surface.&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;Compared with the C-TEM image, the ZPC-TEM image clearly visualizes the fine structures of DNA in a capsid, the hair-like structural objects and the cylindrical structures on the capsid surface.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;==96. Multi pole==&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;The multi pole is an electron optical component for creating a symmetric magnetic field. It is used to correct the aberration of the objective lens.&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;The multi pole is manufactured in such a way that, soft magnetic metal rods are coiled with copper wire and are placed radially and symmetrically with respect to the optical axis of the electron beam (Fig.(a)). According to a desired symmetry of magnetic field, various multi poles are designed. That is, a quadra-pole (Fig.(b)), a hexa-pole (Fig.(c)), an octa-pole (Fig.(d)) and a dodeca-pole (Fig.(e)) are used for TEM. The strength of the magnetic field on the optical axis is varied by adjusting the current applied to the coils.&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;In the spherical aberration (Cs) corrector for the objective lens, a hexa-pole (Fig.(c)) or a dodeca-pole (Fig.(e)) is used to generate a three-fold symmetric magnetic field. There is also a Cs corrector composed of a quadra-pole (Fig.(b)) and an octa-pole (Fig.(d)).&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;It is noted that, in the chromatic aberration (Cc) corrector for the objective lens, a multi pole where an electric field is superposed on a magnetic field is used.&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;[[文件:Multi pole 01.png]]&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;a.	Schematic of magnetic pole, coil, and magnetic field [B] in Quadra-pole&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;b.	Quadra-pole&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;c.	Hexa-pole&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;d.	Octa-pole&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;e.	Dodeca-pole&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Li.qun</name></author>	</entry>

	<entry>
		<id>http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;diff=536&amp;oldid=prev</id>
		<title>Li.qun：/* 13. diffraction limit */</title>
		<link rel="alternate" type="text/html" href="http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;diff=536&amp;oldid=prev"/>
				<updated>2020-05-27T01:47:10Z</updated>
		
		<summary type="html">&lt;p&gt;‎&lt;span dir=&quot;auto&quot;&gt;&lt;span class=&quot;autocomment&quot;&gt;13. diffraction limit&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;
&lt;table class=&quot;diff diff-contentalign-left&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;tr style='vertical-align: top;' lang='zh-Hans'&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;←上一版本&lt;/td&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;2020年5月27日 (三) 01:47的版本&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l52&quot; &gt;第52行：&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;第52行：&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;==13. diffraction limit ==&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;==13. diffraction limit ==&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;The diffraction limit is the resolution limit due to diffraction of an electron wave for the optical system with no aberrations. Even in the aberration-free optical system, electron waves exiting from one point on the object do not form an infinitesimal point on the image plane but these electron waves are focused into a finite size spot (airy disk) due to their diffraction phenomenon. The radius r of the airy disk is given by the equation r = 0.6λ/sinα, where λ is the wavelength of the electron and α is the divergence angle of the electron. From the equation, it is seen that the size of the airy disk is small for a large divergence angle of the electron beam. This limitation makes it impossible to produce an infinitesimal point resolution even for ideal lenses.&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;The diffraction limit is the resolution limit due to diffraction of an electron wave for the optical system with no aberrations. Even in the aberration-free optical system, electron waves exiting from one point on the object do not form an infinitesimal point on the image plane but these electron waves are focused into a finite size spot (airy disk) due to their diffraction phenomenon. The radius r of the airy disk is given by the equation r = 0.6λ/sinα, where λ is the wavelength of the electron and α is the divergence angle of the electron. From the equation, it is seen that the size of the airy disk is small for a large divergence angle of the electron beam. This limitation makes it impossible to produce an infinitesimal point resolution even for ideal lenses.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[[文件:Diffraction limit-1.png]]&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[[文件:Diffraction limit-1.png]]&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Li.qun</name></author>	</entry>

	<entry>
		<id>http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;diff=535&amp;oldid=prev</id>
		<title>Li.qun：/* 13. diffraction limit */</title>
		<link rel="alternate" type="text/html" href="http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;diff=535&amp;oldid=prev"/>
				<updated>2020-05-27T01:46:56Z</updated>
		
		<summary type="html">&lt;p&gt;‎&lt;span dir=&quot;auto&quot;&gt;&lt;span class=&quot;autocomment&quot;&gt;13. diffraction limit&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;
&lt;table class=&quot;diff diff-contentalign-left&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;tr style='vertical-align: top;' lang='zh-Hans'&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;←上一版本&lt;/td&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;2020年5月27日 (三) 01:46的版本&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l52&quot; &gt;第52行：&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;第52行：&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;==13. diffraction limit ==&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;==13. diffraction limit ==&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;The diffraction limit is the resolution limit due to diffraction of an electron wave for the optical system with no aberrations. Even in the aberration-free optical system, electron waves exiting from one point on the object do not form an infinitesimal point on the image plane but these electron waves are focused into a finite size spot (airy disk) due to their diffraction phenomenon. The radius r of the airy disk is given by the equation r = 0.6λ/sinα, where λ is the wavelength of the electron and α is the divergence angle of the electron. From the equation, it is seen that the size of the airy disk is small for a large divergence angle of the electron beam. This limitation makes it impossible to produce an infinitesimal point resolution even for ideal lenses.&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;The diffraction limit is the resolution limit due to diffraction of an electron wave for the optical system with no aberrations. Even in the aberration-free optical system, electron waves exiting from one point on the object do not form an infinitesimal point on the image plane but these electron waves are focused into a finite size spot (airy disk) due to their diffraction phenomenon. The radius r of the airy disk is given by the equation r = 0.6λ/sinα, where λ is the wavelength of the electron and α is the divergence angle of the electron. From the equation, it is seen that the size of the airy disk is small for a large divergence angle of the electron beam. This limitation makes it impossible to produce an infinitesimal point resolution even for ideal lenses.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;−&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;#160;&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins class=&quot;diffchange diffchange-inline&quot;&gt;[[文件:Diffraction limit-1.png]]&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;Figure shows the diffraction limit (vertical axis) r ＝ 0.6λ/sinα for each accelerating voltage as a function of divergence semi-angle α. Since the wavelength of an electron beam is longer for the lower accelerating voltage, the diffraction limit r becomes larger for the lower accelerating voltage even for the same semi-angle α. In the case of an accelerating voltage of 200 kV, a resolution of 0.1 nm expected from the diffraction limit is achieved with a divergence semi-angle of approximately 15 mrad. In the case of 80 kV, however, a larger divergence semi-angle of an approximately 25 mrad is required because of a longer wavelength of the electron beam.&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;Figure shows the diffraction limit (vertical axis) r ＝ 0.6λ/sinα for each accelerating voltage as a function of divergence semi-angle α. Since the wavelength of an electron beam is longer for the lower accelerating voltage, the diffraction limit r becomes larger for the lower accelerating voltage even for the same semi-angle α. In the case of an accelerating voltage of 200 kV, a resolution of 0.1 nm expected from the diffraction limit is achieved with a divergence semi-angle of approximately 15 mrad. In the case of 80 kV, however, a larger divergence semi-angle of an approximately 25 mrad is required because of a longer wavelength of the electron beam.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Li.qun</name></author>	</entry>

	<entry>
		<id>http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;diff=533&amp;oldid=prev</id>
		<title>Li.qun：/* 13. diffraction limit */</title>
		<link rel="alternate" type="text/html" href="http://wiki.jeol.com.cn/wiki/index.php?title=%E9%80%8F%E9%95%9C%E7%B3%BB%E7%BB%9F&amp;diff=533&amp;oldid=prev"/>
				<updated>2020-05-27T01:45:34Z</updated>
		
		<summary type="html">&lt;p&gt;‎&lt;span dir=&quot;auto&quot;&gt;&lt;span class=&quot;autocomment&quot;&gt;13. diffraction limit&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;
&lt;table class=&quot;diff diff-contentalign-left&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;tr style='vertical-align: top;' lang='zh-Hans'&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;←上一版本&lt;/td&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;2020年5月27日 (三) 01:45的版本&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l52&quot; &gt;第52行：&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;第52行：&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;==13. diffraction limit ==&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;==13. diffraction limit ==&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;The diffraction limit is the resolution limit due to diffraction of an electron wave for the optical system with no aberrations. Even in the aberration-free optical system, electron waves exiting from one point on the object do not form an infinitesimal point on the image plane but these electron waves are focused into a finite size spot (airy disk) due to their diffraction phenomenon. The radius r of the airy disk is given by the equation r = 0.6λ/sinα, where λ is the wavelength of the electron and α is the divergence angle of the electron. From the equation, it is seen that the size of the airy disk is small for a large divergence angle of the electron beam. This limitation makes it impossible to produce an infinitesimal point resolution even for ideal lenses.&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;The diffraction limit is the resolution limit due to diffraction of an electron wave for the optical system with no aberrations. Even in the aberration-free optical system, electron waves exiting from one point on the object do not form an infinitesimal point on the image plane but these electron waves are focused into a finite size spot (airy disk) due to their diffraction phenomenon. The radius r of the airy disk is given by the equation r = 0.6λ/sinα, where λ is the wavelength of the electron and α is the divergence angle of the electron. From the equation, it is seen that the size of the airy disk is small for a large divergence angle of the electron beam. This limitation makes it impossible to produce an infinitesimal point resolution even for ideal lenses.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;−&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;del class=&quot;diffchange diffchange-inline&quot;&gt;[[文件:Diffraction limit.png]]&lt;/del&gt;&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;#160;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;Figure shows the diffraction limit (vertical axis) r ＝ 0.6λ/sinα for each accelerating voltage as a function of divergence semi-angle α. Since the wavelength of an electron beam is longer for the lower accelerating voltage, the diffraction limit r becomes larger for the lower accelerating voltage even for the same semi-angle α. In the case of an accelerating voltage of 200 kV, a resolution of 0.1 nm expected from the diffraction limit is achieved with a divergence semi-angle of approximately 15 mrad. In the case of 80 kV, however, a larger divergence semi-angle of an approximately 25 mrad is required because of a longer wavelength of the electron beam.&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;Figure shows the diffraction limit (vertical axis) r ＝ 0.6λ/sinα for each accelerating voltage as a function of divergence semi-angle α. Since the wavelength of an electron beam is longer for the lower accelerating voltage, the diffraction limit r becomes larger for the lower accelerating voltage even for the same semi-angle α. In the case of an accelerating voltage of 200 kV, a resolution of 0.1 nm expected from the diffraction limit is achieved with a divergence semi-angle of approximately 15 mrad. In the case of 80 kV, however, a larger divergence semi-angle of an approximately 25 mrad is required because of a longer wavelength of the electron beam.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Li.qun</name></author>	</entry>

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